Expert System Design of Two Electrostatic Lenses Column by Mixing Dynamic Programming and AI Techniques

Abstract This paper have shown an expert system design by using optimization methods for the Focused ion beam FIB optical system, by mixing the dynamic programming procedure and artificial intelligence technique to build an intelligent agent. CADION ANALYZER has been designed as an interpretation expert system, written in Java expert system shell (JESS) and Visual Basic.Net for optimizing and analyzing calculation processes for two electrostatic lenses column. By using such rule based engine, the optimized axial potential distributions for electrostatic fields undergo the constraints have been used in the two – lens optical column setup FIB.